发明名称 |
METHOD FOR FORMING DLC FILM ON SPLINE SHAFT AND HOT CATHODE PIG PLASMA CVD DEVICE |
摘要 |
Plural spline shafts are arranged around columnar plasma, and plural spline shafts are coaxially aligned in a direction that the columnar plasma extends within a vacuum chamber. The plural coaxially aligned spline shafts are positioned so that axial gap is formed between the respective male spline sections. The axial gap of the plural male spline sections is positioned at a center of the columnar plasma in the direction that the columnar plasma extends.
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申请公布号 |
US2013220798(A1) |
申请公布日期 |
2013.08.29 |
申请号 |
US201213594133 |
申请日期 |
2012.08.24 |
申请人 |
ANDO JUNJI;SUZUKI TOMOO;OGAWA TOMOKI;IWAI AKINORI;YOSHIMURA NOBUYOSHI;HASHITOMI HIROYUKI;CNK CO., LTD.;JTEKT CORPORATION |
发明人 |
ANDO JUNJI;SUZUKI TOMOO;OGAWA TOMOKI;IWAI AKINORI;YOSHIMURA NOBUYOSHI;HASHITOMI HIROYUKI |
分类号 |
C23C14/06 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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