LASER PROCESSING DEVICE AND METHOD OF PROCESSING WORKPIECE USING LASER PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser processing device capable of reducing a variation of processing accuracy when performing processing in two directions orthogonal to each other even if a beam profile is not isotropic relative to a movement direction.SOLUTION: A laser processing device includes: a branch means for branching laser light emitted from a laser light source to first branch light and second branch light; and a conversion means for rotating a beam profile of the second branch light at 90° about a movement direction. By switching between the first branch light and the second branch light passed through the conversion means, a workpiece fixed to a stage portion can be selectively irradiated with either of the two types of laser light having the same beam profile and orientations orthogonal to each other.