发明名称 |
COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS |
摘要 |
A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
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申请公布号 |
US2013221247(A1) |
申请公布日期 |
2013.08.29 |
申请号 |
US201313846894 |
申请日期 |
2013.03.18 |
申请人 |
GIGAPHOTON INC.;GIGAPHOTON INC. |
发明人 |
SOMEYA HIROSHI;ABE TAMOTSU;SUGANUMA TAKASHI;HOSHINO HIDEO;SUMITANI AKIRA |
分类号 |
G02B7/183;H05G2/00 |
主分类号 |
G02B7/183 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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