Electromagnetic radiation deflecting device for e.g. laser machining apparatus, for irradiating object such as workpiece, has second beam deflector that deflects turned electromagnetic radiation along second and third directions

摘要

The electromagnetic radiation deflecting device (10) has a first beam deflector (16) comprising a deflector unit (30) for deflecting electromagnetic radiation (14) along a first direction, and an image field rotator (34) for turning the deflected electromagnetic radiation (32) by a predetermined rotational angle. A second beam deflector (20) deflects turned electromagnetic radiation along second and third directions, such that directional component of second direction is vertical to third direction. An independent claim is included for electromagnetic radiation deflecting method.