CARBON NANO-TUBE RESISTOR, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING CARBON NANO-TUBE RESISTOR AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a high-reliability resistor or a carbon nano-tube resistor capable of applying fuse.SOLUTION: A manufacturing method includes a step for preparing an initial solution by throwing a carbon nano-tube into a volatile solvent so as to be a first concentration and applying ultrasonic processing thereto, a step for diluting the initial solution with the volatile solvent step by step while applying ultrasonic processing, adjusting the initial solution to be a second concentration and preparing a coating solution, and a step for applying the coating solution between a first electrode and a second electrode. The first concentration is a concentration equal to or higher than 1×10g/ml and the second concentration is lower than 1×10g/ml.