| 发明名称 |
SEMICONDUCTOR THIN FILM, METHOD FOR PRODUCING THE SAME, AND THIN FILM TRANSISTOR |
| 摘要 |
A transparent semiconductor thin film 40 having low carrier concentration and a large energy band gap is produced by forming a thin film which contains indium oxide and an oxide of a positive divalent element, and then oxidizing or crystallizing the thin film.
|
| 申请公布号 |
US2013221348(A1) |
申请公布日期 |
2013.08.29 |
| 申请号 |
US201313838337 |
申请日期 |
2013.03.15 |
| 申请人 |
IDEMITSU KOSAN CO., LTD.;IDEMITSU KOSAN CO., LTD. |
发明人 |
YANO KOKI;INOUE KAZUYOSHI;SHIMANE YUKIO;SHIBUYA TADAO;YOSHINAKA MASAHIRO |
| 分类号 |
H01L29/66;H01L29/786 |
主分类号 |
H01L29/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
