| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a line conductor which improves energy propagation efficiency in the line conductor.SOLUTION: A manufacturing method of a line conductor includes the steps of: forming a first resist 33 on a substrate 31; forming a recessed part in the first resist 33 and forming a foot 34 extending an inward direction of the recessed part at a root part of the recessed part that is located close to the substrate; and embedding a conductive material 35 in the recessed part. Further, the manufacturing method includes the step of performing physical etching or chemical etching to the conductive material thereby creating roundness of a corner at the side, at which the foot is not formed, in the conductive material. |
