发明名称 ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To attain observation of an image projected on a fluorescent plate without distortion in a transmission electron microscope.SOLUTION: An electron microscope includes: an electron gun which generates an electron beam; a lens barrel which maintains a passage part of the electron beam vacuum; an irradiation part which irradiates the electron beam on a sample; an image formation part which magnifies the electron beam transmitted the sample; a fluorescent plate on which a magnified sample image is projected; a mirror which reflects the image on the fluorescent plate; and an external camera which picks up an image on the mirror, in which the mirror is arranged inside the lens barrel, and out of the passage area of the electron beam.
申请公布号 JP2013168332(A) 申请公布日期 2013.08.29
申请号 JP20120032282 申请日期 2012.02.17
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 UEDA HIROMASA;NAGAOKI ISAO;TANIGUCHI YOSHIFUMI
分类号 H01J37/22 主分类号 H01J37/22
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