| 摘要 |
<p>In the present invention, six gas nozzles (9) are disposed at hexagonally symmetric positions on an imaginary circle (S) having a center at the center of a substrate (5). Of the gas nozzles, four gas nozzles (9v) are vertical jetting nozzles of which the direction of the central vector of gas jetting is the direction perpendicular to the substrate (5), and two gas nozzles (9c) are oblique jetting nozzles of which the central vector of gas jetting has a component in the direction tangential to the imaginary circle (S). By means of the component in the direction tangential to the imaginary circle (S), the reaction gas supplied from the oblique jetting nozzles (9c) imparts rotational force to the circulation of reaction gas in a chamber (1), and the reaction gas forms a state of circulating as a whole while rotating within the chamber (1). Also, the state of mixture of the reaction gas becomes yet more favorable by means of the rotational component.</p> |
