发明名称 Apparatus for cleaning semiconductor chip packages
摘要 PURPOSE: An apparatus for cleaning a semiconductor chip package is provided to effectively remove a foreign substance by using two kinds of brushes. CONSTITUTION: A first brush (112) is contacted with a semiconductor chip package to remove a foreign substance. The semiconductor chip package is fixed to a picker. A second brush (116) removes the foreign substance remaining in the semiconductor chip package. A nozzle part (120) includes nozzles. The nozzles spray water and air to the semiconductor chip package.
申请公布号 KR101301353(B1) 申请公布日期 2013.08.29
申请号 KR20110144381 申请日期 2011.12.28
申请人 发明人
分类号 H01L21/02;H01L21/302;H01L21/78 主分类号 H01L21/02
代理机构 代理人
主权项
地址
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