发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 As for a semiconductor device which is typified by a display device, it is an object to provide a highly reliable semiconductor device to which a large-sized or high-definition screen is applicable and which has high display quality and operates stably. By using a conductive layer including Cu as a long lead wiring, an increase in wiring resistance is suppressed. Further, the conductive layer including Cu is provided in such a manner that it does not overlap with the semiconductor layer in which a channel region of a TFT is formed, and is surrounded by insulating layers including silicon nitride, whereby diffusion of Cu can be prevented; thus, a highly reliable semiconductor device can be manufactured. Specifically, a display device which is one embodiment of a semiconductor device can have high display quality and operate stably even when the size or definition thereof is increased.
申请公布号 EP2486596(A4) 申请公布日期 2013.08.28
申请号 EP20100821867 申请日期 2010.09.15
申请人 SEMICONDUCTOR ENERGY LABORATORY CO. LTD. 发明人 YAMAZAKI, SHUNPEI;UOCHI, HIDEKI;NAKAMURA, YASUO;SUGAO, JUNPEI;KOYAMA, JUN
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L27/12;H01L29/49 主分类号 H01L29/786
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