发明名称
摘要 PROBLEM TO BE SOLVED: To provide a film for processing wafers capable of fully suppressing the occurrence of transfer marks on an adhesive layer when winding a film for processing wafers having a dicing-die-bonding film made of an adhesive layer and a viscous film in a roll. SOLUTION: The film 10 for processing wafers includes: a base material film 11; a viscous film 12 made of a bonding agent layer provided on the base material film; and an adhesive layer provided on the bonding agent layer. The bonding agent layer contains radiation-polymerizable compounds and one photo initiator at a part corresponding to at least a ring frame, and radiation-polymerizable compounds and another photo initiator at a part other than places including one photo initiator. The wavelength of light to which one photo initiator reacts differs from that of light to which another photo initiator reacts. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP5275834(B2) 申请公布日期 2013.08.28
申请号 JP20090024005 申请日期 2009.02.04
申请人 发明人
分类号 H01L21/301;H01L21/52;H01L21/683 主分类号 H01L21/301
代理机构 代理人
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