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发明名称
摘要
申请公布号
JP5275243(B2)
申请公布日期
2013.08.28
申请号
JP20090533797
申请日期
2007.10.19
申请人
发明人
分类号
C23C16/30;C07F9/00;C23C16/34;H01L21/316
主分类号
C23C16/30
代理机构
代理人
主权项
地址
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