发明名称 Multi-layer chip for gas chromatography and fabrication method thereof
摘要 <p>Disclosed herein are a multi-layer chip for gas chromatography and a method of fabricating the multi-layer chip. The multi-layer chip is fabricated by: forming fine channels at the same positions of a plurality of substrates using only a single photo mask and an alignment key; and stacking the substrates. That is, the multi-layer chip can be fabricated by a simple method, and the total length of the fine channels can be increase without a limit by stacking more substrates. In addition, layers of the substrates can be coated with different stationary phases, and a temperature control device can be attached to heat transfer contact portions of the multi-layer chip for controlling the temperature of the multi-layer chip rapidly and precisely. Therefore, the multi-layer chip may be useful for high-separability gas chromatography to separate and analyze an infinitesimal amount of a sample.</p>
申请公布号 KR101301256(B1) 申请公布日期 2013.08.28
申请号 KR20110125077 申请日期 2011.11.28
申请人 发明人
分类号 B01D53/14;G01N30/02;G01N30/30 主分类号 B01D53/14
代理机构 代理人
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