| 摘要 |
<p>A piezoelectric device (10, 50, 70) includes: a substrate (12, 30); a first electrode (14, 32) which is layered over the substrate (12, 30); a first piezoelectric film (16, 34, 74) which is layered over the first electrode (14, 32); a metal oxide film (18, 36) which is layered over the first piezoelectric film (16, 34, 74); a metal film (20, 38) which is layered over the metal oxide film (18, 36); a second piezoelectric film (22, 44, 76) which is layered over the metal film (20, 38); and a second electrode (24, 46) which is layered over the second piezoelectric film (22, 44, 76), wherein a polarizing direction of the first piezoelectric film (16, 34, 74) and a polarizing direction of the second piezoelectric film (22, 44, 76) are different from each other.
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