BAOT FOR LOADING SEMICONDUCTOR SUBSTRATE

摘要

PURPOSE: A boat for loading a semiconductor substrate is provided to reduce process time, by not using a dummy wafer. CONSTITUTION: A top plate (20) and a bottom plate (10) are separated from each other. A load (30) is formed between the top plate and the bottom plate. A plurality of buffer plates (40) is arranged with a first gap along the length direction of the load. A supporting part is formed between a first buffer plate and a second buffer plate. The supporting part supports a semiconductor substrate.