| 摘要 |
A method for the plasma treatment of a workpiece that includes inserting the workpiece into a plasma chamber and depositing, with the effect of a partial vacuum after plasma ignition, a coating on the workpiece by plasma treatment. Plasma ignition occurs by pulsed microwave energy, and alternating “on” phase times and “off” phase times from pulsed microwave excitation are provided by a control. During a beginning portion of the plasma treatment, a first portion of the coating is deposited. Subsequently, a quotient of the “on” phase times and the “off” phase times is increased to deposit a second portion of the coating, which has a different composition than the first portion of the coating. The quotient of the “on” phase times and the “off” phase times is then decreased to form a third portion of the coating, which has a different composition than the second portion of the coating. |
