| 摘要 |
<p>A metrological apparatus has a mover (9) to carry out a measurement by effecting relative movement in a measurement direction between a workpiece support surface (16) and a stylus (11) such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path on a workpiece surface. A data processor is configured to determine a location of a centre of the stylus tip at measurement points along a measurement path on a surface of a workpiece, the stylus tip locations defining a stylus tip locus; and to determine a surface form of the surface being measured using the determined stylus tip locus.</p> |
