发明名称
摘要 A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit. The output instruction includes an instruction for designating one or more desired number of times of execution of a sub-recipe among plural number of times of execution of the sub-recipe in the recipe and the measurement information acquisition unit acquires measurement information corresponding to the sub-recipe designated by the output instruction.
申请公布号 JP5273697(B2) 申请公布日期 2013.08.28
申请号 JP20060209424 申请日期 2006.08.01
申请人 发明人
分类号 H01L21/02;G06F13/00 主分类号 H01L21/02
代理机构 代理人
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