| 摘要 |
The present invention discloses a method and apparatus for detecting film defect, in a method for detecting the film defect by reflexion scattered light of detection light (20) irradiating from a light-projecting machine (22) to a transparent film face (12) reflected on the film surface by a light-receiving machine (24), and detecting the minuteness scaur (14) of the film surface based on the detection result, in one aspect, the transparent film (12) is dragged along a length direction and a width direction to hold the planarity of the film, in another aspect, the detection light (20) is irradiated on the film surface, and the reflexion scattered light is received, wherein the light-projecting machine (22) is arranged along a parallel direction of a generating direction of the minuteness scaur (14). Thereby, it is capable of detecting the film defect with a high sensitivity even though the minuteness defect generated on the film surface. |
