发明名称 Method and structure for controlling magnetic field distributions in an ExB wien filter
摘要 An ExB Wien mass filter (700) providing a method and structure for mechanically adjusting the magnetic field distributions at the mass filter entrance and exit end caps (722 and 726, respectively). The reluctance of the flux return path may be modified by configuring pluralities of magnetic shims (790, 796) within slots (750, 756) at the outer diameters of the entrance and exit end caps, and also by configuring pluralities of magnetic plug shims (906) within circular flux dams (902) surrounding the entrance and exit apertures (724 and 728, respectively). Advantages of purely mechanical adjustment for the magnetic fields of the present invention, compared with prior art electromagnet adjustment methods include greater reliability, simplicity, lower cost, and lack of power dissipation. The invention may employ either permanent magnets or electromagnets for generation of the mass-separation magnetic field.
申请公布号 EP2525384(A3) 申请公布日期 2013.08.28
申请号 EP20120167972 申请日期 2012.05.15
申请人 FEI COMPANY 发明人 MCGINN, JAMES
分类号 H01J37/05;H01J37/15;H01J49/28 主分类号 H01J37/05
代理机构 代理人
主权项
地址