METHOD FOR MANUFACTURING SOI WAFER,申请号EP20090809473-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING SOI WAFER
摘要
申请公布号	EP2320450(B1)	申请公布日期	2013.08.28
申请号	EP20090809473	申请日期	2009.07.29
申请人	SHIN-ETSU HANDOTAI CO., LTD.	发明人	OKA, SATOSHI;KUWABARA, SUSUMU
分类号	H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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