发明名称 Template-registered diblock copolymer mask for MRAM device formation
摘要 A device comprising a diblock copolymer mask for fabricating a magnetoresistive random access memory (MRAM) includes a magnetic layer; a mask formed on the magnetic layer; a template formed on the mask; and the diblock copolymer mask, the diblock copolymer mask comprising a first plurality of uniform shapes formed on and registered to the template.
申请公布号 US8519497(B2) 申请公布日期 2013.08.27
申请号 US201213396998 申请日期 2012.02.15
申请人 GAIDIS MICHAEL C.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 GAIDIS MICHAEL C.
分类号 H01L29/82 主分类号 H01L29/82
代理机构 代理人
主权项
地址