发明名称 |
XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus |
摘要 |
An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen. One of the pair of supporters can be a rolling guide which guides the movement of the Y-axis movable body in the Y-axis direction, and the other of the pair of supporters can be an air pad which supports the Y-axis movable body in non-contact with the platen.
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申请公布号 |
US8517363(B2) |
申请公布日期 |
2013.08.27 |
申请号 |
US20100725821 |
申请日期 |
2010.03.17 |
申请人 |
MAKINO FUMINORI;KOYANAGAWA YASUSHI;NAKAJIMA RYUTA;SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
MAKINO FUMINORI;KOYANAGAWA YASUSHI;NAKAJIMA RYUTA |
分类号 |
G05D3/12 |
主分类号 |
G05D3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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