METHOD FOR INTERFEROMETRIC CONTROL OF IMAGE QUALITY AND DISTORTION OF OPTICAL SYSTEMS AT OPERATING WAVELENGTH

摘要

FIELD: physics.SUBSTANCE: method involves generating radiation at operating wavelength using an interferometer in form of a homocentric beam of rays, the centre of which is a test object which is superposed with the object plane of the analysed lens. After passing through the analysed lens, the beam of rays is reflected from a counter-mirror which enable beams to fall on a normal and return through the lens to the interferometer where the beam of rays is combined with the reference wave front of the interferometer and a fringe pattern is recorded. Distortion of the wave front of the beam of rays that has passed through the lens twice is determined, wherein the position of the centre of the beam of rays formed by the interferometer and the counter-mirror for each separate point of the field is determined. When determining wave aberrations and distortion on the entire image field and focal depth, said cycle of operations is repeated for multiple required mutually coordinated positions of the interferometer and the counter-mirror.EFFECT: enabling simultaneous measurement of distortion and other types of aberrations of both projection lenses and remote probing lenses.1 dwg