发明名称 Method of producing nanopatterned articles using surface-reconstructed block copolymer films
摘要 Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.
申请公布号 US8518837(B2) 申请公布日期 2013.08.27
申请号 US20090566705 申请日期 2009.09.25
申请人 RUSSELL THOMAS P.;PARK SOOJIN;WANG JIA-YU;KIM BOKYUNG;THE UNIVERSITY OF MASSACHUSETTS 发明人 RUSSELL THOMAS P.;PARK SOOJIN;WANG JIA-YU;KIM BOKYUNG
分类号 H01L21/31 主分类号 H01L21/31
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