发明名称 Method for manufacturing semiconductor package
摘要 PURPOSE: A method for manufacturing a semiconductor package is provided to reduce the number of process and process time by forming an UBM by using a redistribution line as a plating line after the redistribution line is formed. CONSTITUTION: A first passivation layer(16) is formed in a surface except the bonding pad(12) of a semiconductor chip(10). A first seed layer(20) is formed in the upper surface of the bonding pad and the first passivation layer. A first photoresist is coated on the surface of the first passivation layer. A redistribution line(18) is formed on the first seed layer. A second photoresist is coated on the area except the other end part of the redistribution line. An UBM is formed on the other end part of the redistribution line.
申请公布号 KR101300574(B1) 申请公布日期 2013.08.27
申请号 KR20110131525 申请日期 2011.12.09
申请人 发明人
分类号 H01L21/60;H01L23/48 主分类号 H01L21/60
代理机构 代理人
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