| 摘要 |
FIELD: measurement equipment.SUBSTANCE: device with a membrane manometric element comprises a vessel body, consisting at least partially of sapphire, and a sapphire membrane with a peripheral edge area connected by the first seal with the vessel body for creation of a chamber of reference vacuum. The ceramic body of the substrate is installed on the rear side of the vessel body with the help of a glass solder. The tubular body of the metering element receives the metering element mounted on the ceramic body of the substrate, besides, the body of the metering element has inside a circumferential sealing surface, corresponding with the first sealing surface. Between sealing surfaces there is a metal circular seal, besides, there are clamping facilities to press sealing surfaces to each other. In the central area of the vessel body there is an optical window. One area of the membrane surface is arranged as optically reflecting, and opposite to this optically reflecting area there is optical fibre pressed into the vessel body with a seal.EFFECT: increased reliability of an instrument and accuracy of measurements.27 cl, 9 dwg |
