发明名称 |
Electron source and electron beam apparatus |
摘要 |
Provided is an electron source which outputs a stable electron beam even when vibration is applied from the external to an apparatus which uses the electron source. The electron source is provided with an insulator (5); two conductive terminals (4) arranged at an interval on the insulator (5); a long filament (3) stretched between the conductive terminals (4); and a needle-like cathode (1) having an electron emitting section attached to the filament (3). The vertical cross-section shape of the filament (3) in the axis direction has a long direction and a short direction, and the maximum length in the long direction is 1.5 times or more but not more than 5 times the maximum length in the short direction.
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申请公布号 |
US8519608(B2) |
申请公布日期 |
2013.08.27 |
申请号 |
US20080680918 |
申请日期 |
2008.10.03 |
申请人 |
NONOGAKI RYOZO;TERUI YOSHINORI;DENKI KAGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
NONOGAKI RYOZO;TERUI YOSHINORI |
分类号 |
H01J1/02;H01J1/304;H01J1/62 |
主分类号 |
H01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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