发明名称 |
Etch resistant gas sensor |
摘要 |
A gas sensor for sensing chemical gases utilizes a metal oxynitride as the sensing material, which changes its conductivity when exposed to the analyte gas. The change in conductivity is measured for the sensor output. The metal may be either tungsten or molybdenum.
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申请公布号 |
US8519446(B2) |
申请公布日期 |
2013.08.27 |
申请号 |
US20080333545 |
申请日期 |
2008.12.12 |
申请人 |
DASS RONALD I.;NOVAK JAMES;APPLIED NANOTECH HOLDINGS, INC. |
发明人 |
DASS RONALD I.;NOVAK JAMES |
分类号 |
G01N27/407 |
主分类号 |
G01N27/407 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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