Laser illumination device, illumination method, semiconductor element manufacturing method, projection display device, and image display method using the projection display device

摘要

A laser illumination device for providing a light intensity distribution of a high-intensity and uniform illumination light flux is obtained. The device includes a plurality of light source modules (20) each including: a plurality of light source units (8), in each of which a semiconductor laser (1), and a laser medium (5) and a nonlinear material (7) which are flat-shaped and have a waveguide structure are arranged on the same plane, for performing continuous oscillation in a waveguide mode of the laser medium (5); and a first optical system (12) for coupling laser oscillation beams from the plurality of light source units (8). The device further includes: a second optical system (15) for coupling laser light beams propagating from the plurality of light source modules (20) through first optical fibers (13) and a second optical fiber array (14); a uniformization element (16) for converting a laser light beam from the second optical system (15) into a uniform laser light beam; and a third optical system (17) for projecting, to a substrate (19) which is an illuminated surface (18), the uniform laser light beam obtained through the uniformization element (16) at a predetermined magnification, to produce an illumination light flux (11).