发明名称 Metallization processes, mixtures, and electronic devices
摘要 One aspect of the present invention is a method of processing a substrate. In one embodiment, the method comprises forming an electrical conductor on or in the substrate by providing a mixture comprising metal particles and an electroless deposition solution and electrolessly depositing a metal matrix and co-depositing the metal particles. In another embodiment, the method comprises forming an electrical conductor on or in the substrate by providing a mixture comprising metal particles and an electrochemical plating solution and electrochemically plating a metal matrix and co-depositing the metal particles. Another aspect of the present invention is a mixture for the formation of an electrical conductor on or in a substrate. Another aspect of the present invention is an electronic device.
申请公布号 US8518826(B2) 申请公布日期 2013.08.27
申请号 US20100835534 申请日期 2010.07.13
申请人 KOLICS ARTUR;REDEKER FRITZ;LAM RESEARCH CORPORATION 发明人 KOLICS ARTUR;REDEKER FRITZ
分类号 H01L21/44 主分类号 H01L21/44
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