| 摘要 |
<p>PURPOSE: A nanoscale resonator, a nanoscale sensor, and a manufacturing method thereof are provided to use an air gap and an anchor of the same height, thereby improving a crystal characteristic deterioration problem of a resonant layer due to the inclined structure. CONSTITUTION: A resonant unit (210) resonates based on an applied signal. Based on the laser interferometeric lithography using the interference fringes of light, the resonant unit is formed in the nanoscale. The resonant unit comprises a first electrode (261), a second electrode (263), resonant layers (251,253), and a sub resonant unit (211). An air gap (220) is located in the upper part of a substrate (240) and reflects the vertical directional waive which is generated from the resonant unit. Anchors (231,233) are located on both sides of the air gap. The anchors have the same gap with the air gap and support the resonant unit. Based on the laser interferometeric lithography using the interference fringes of light, the resonant unit of the nanoscale is formed.</p> |
