PROCESSING IMPLEMENT POSITION ALIGNMENT DEVICE FOR COMPONENT AND METHOD THEREOF

摘要

PURPOSE: An apparatus and method for aligning the position of a processing device with regard to components are provided to reduce thermal expansion by using scanning units which are separately aligned. CONSTITUTION: A second object (O2) faces a first object (O1) and moves in at least one movement direction. The second object includes a processing device, an alignment sensor, and a measurement tool. The processing device detects an object alignment mark. The alignment sensor detects the object alignment mark and a component alignment mark. The measurement tool is extended in at least one movement direction.