MASS DAMPER FOR SEMICONDUCTOR WAFER HANDLING END EFFECTOR

摘要

PURPOSE: A mass damper for semiconductor wafer handling end effector is provided to reduce vibration of a moving wafer by separating a resonance frequency of a wafer at least one octave. CONSTITUTION: A wafer (102) is introduced through a load lock. The load lock is configured to show the inside. The load lock protects an arm (104). The arm is connected to a carriage interface. An end effector (106) is connected to an end unit of the arm.