发明名称 Optical scanning apparatus configured to deflect and scan laser beam by using MEMS mirror
摘要 During one cycle of reciprocating operation of a MEMS mirror, a light receiving sensor detects a falling time at which a laser beam reflected by an upstream-of-sensor mirror and scanned in one direction passes an edge of a regulation portion, and a rising time at which the laser beam scanned in the other opposed direction passes the edge of the regulation portion. A controller executes an arithmetic operation on the basis of the two times detected by the light receiving sensor and controls the operation of the MEMS mirror, which is performed by the driver, such that the detected two times are held at respective setting times.
申请公布号 US8520282(B2) 申请公布日期 2013.08.27
申请号 US20080340388 申请日期 2008.12.19
申请人 OBARA MITSUHIRO;AZAMI JUNYA;CANON KABUSHIKI KAISHA 发明人 OBARA MITSUHIRO;AZAMI JUNYA
分类号 G02B26/08 主分类号 G02B26/08
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