发明名称 Micromachined piezoelectric z-axis gyroscope
摘要 This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.
申请公布号 US8516887(B2) 申请公布日期 2013.08.27
申请号 US20100930175 申请日期 2010.12.30
申请人 ACAR CENK;SHENOY RAVINDRA VAMAN;BLACK JUSTIN PHELPS;PETERSEN KURT EDWARD;GANAPATHI SRINIVASAN KODAGANALLUR;STEPHANOU PHILIP JASON;QUALCOMM MEMS TECHNOLOGIES, INC. 发明人 ACAR CENK;SHENOY RAVINDRA VAMAN;BLACK JUSTIN PHELPS;PETERSEN KURT EDWARD;GANAPATHI SRINIVASAN KODAGANALLUR;STEPHANOU PHILIP JASON
分类号 G01C19/56;G01P15/18 主分类号 G01C19/56
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