| 发明名称 |
Graphoepitaxial self-assembly of arrays of downward facing half-cylinders |
| 摘要 |
Methods for fabricating sub-lithographic, nanoscale microstructures in line arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.
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| 申请公布号 |
US8518275(B2) |
申请公布日期 |
2013.08.27 |
| 申请号 |
US201213396039 |
申请日期 |
2012.02.14 |
| 申请人 |
MILLWARD DAN B.;WESTMORELAND DONALD;MICRON TECHNOLOGY, INC. |
发明人 |
MILLWARD DAN B.;WESTMORELAND DONALD |
| 分类号 |
B44C1/22;B82Y40/00;H01L21/302 |
主分类号 |
B44C1/22 |
| 代理机构 |
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