SCANNING MICROWAVE MICROSCOPE FOR CONTROL OF ELECTROPHYSICAL PARAMETERS OF SEMICONDUCTOR STRUCTURES

摘要

A scanning microwave microscope for control of electrophysical parameters of semiconductor structures comprises a SHF generator, a coaxial resonant cavity with a pointed central conductor, a detector, a controllable table for semiconductor samples, a unit for control and processing information signals. The central conductor of resonant cavity is located inside of a dielectric tube beam waveguide; an auxiliary emitting source is connected to the dielectric beam waveguide face.