摘要 |
A light signal transfer device comprises a substrate having a gate dielectric layer; a source and drain doped regions formed in the substrate; a gate formed on the gate dielectric layer; a carbon nano-tube material formed under the gate dielectric layer to act a channel; and a photo-diode doped region formed adjacent to one of the source and drain doped regions, wherein the areas of the channel and the photo-diode doped region are fixed, the carbon nano-tube material reducing area of the channel and increase photo reception area for the photo-diode doped region to improve performance of the light signal transfer device.
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