APPARATUS FOR REDUCING ENERGY OF SCRUBBER AND METHOD FOR THE SAME AND SYSTEM FOR THE SAME

摘要

PURPOSE: A control device for reducing the energy of a scrubber device, a method, and a system thereof are provided to reduce a risk by just turning on a main scrubber. CONSTITUTION: A scrubber controller (104) includes a processing state determination module and a control module for reducing scrubber energy. The processing state determination module determines the processing state of each processing chamber. The control module for reducing the scrubber energy controls the state of scrubbers (103-1, 103-2). The scrubbers are individually connected to a plurality of processing chambers. The control module for reducing the scrubber energy differently controls the driving state of a high frame and a low frame. [Reference numerals] (103-1) Scrubber "A"; (103-2) Scrubber "B"; (104) Scrubber controller