| 摘要 |
In a method of manufacturing a disk drive device, a cleaning process and an assembly process are performed in succession in a clean room having a predetermined cleanness level. The cleaning process includes an alkali cleaning process, a first purified water cleaning process, a second purified water cleaning process, a spray cleaning process, a draining process and a drying process. In the first purified water cleaning process, purified water ultrasonic wave cleaning is sequentially performed on the base member of the disk drive device to be cleaned by using ultrasonic waves of frequencies of 40 kHz, 68 kHz and 132 kHz in purified water filled in a first purified water cleaning tank. The cleaned base member and other components having a predetermined cleanness level are assembled in the assembly process continuous from the cleaning process.
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