| 摘要 |
PURPOSE: A shower head and a manufacturing method thereof are provided to improve accuracy of process control, by maintaining uniform surface temperature. CONSTITUTION: A housing sprays a process gas to a substrate. The housing forms a coating film (100a) on a surface facing with the substrate. The coating film includes one of silicon carbide or graphite. A first discharge tube (121) discharges a first process gas to the substrate. A second discharge tube (122) discharges a second process gas to the substrate. |
