发明名称 MEMORY ARRAYS HAVING DIFFERENT SUBSTANTIALLY VERTICAL DISTANCES BETWEEN ADJACENT MEMORY CELLS
摘要 <p>Memory arrays and their formation are disclosed. One such memory array has a string of series-coupled memory cells with a substantially vertical portion. A distance between adjacent memory cells at one end of the substantially vertical portion is greater than a distance between adjacent memory cells at an opposing end of the substantially vertical portion. For other embodiments, thicknesses of respective control gates of the memory cells and/or thicknesses of the dielectrics between successively adjacent control gates may increase as the distances of the respective control gates/dielectrics from the opposing end of the substantially vertical portion increase.</p>
申请公布号 KR20130094832(A) 申请公布日期 2013.08.26
申请号 KR20137011926 申请日期 2011.09.22
申请人 MICRON TECHNOLOGY, INC. 发明人 GODA AKIRA
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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