| 摘要 |
<p>PURPOSE: A transfer system reduces load applied to each robot control device by dispersing the load of the robot control device. CONSTITUTION: A substrate positioning device (50) controls the position of a substrate to be mounted on a mounting table. A first robot (10) and the substrate positioning device are connected to a first robot control device (30). A second robot (20) among multiple robots is connected to a second robot control device (40). The first robot control device includes a position acquisition unit (31), a correction unit, an unloading position transmitting unit (33), and a memory unit. The first robot control device controls the operation of the substrate positioning device determining the position of the first robot and a wafer. [Reference numerals] (10) First robot; (20) Second robot; (30) First robot control device; (31) Position acquisition unit; (32) Correction unit; (33) Unloading position transmitting unit; (34) Memory unit; (34a) Position information; (40) Second robot control device; (41) Unloading position receiving unit; (42) Operation instruction unit; (50) Substrate position determining unit; (60) Host device</p> |
