发明名称 |
A support bar for substrate-loading cassette and the manufacturing method thereof |
摘要 |
PURPOSE: A support bar for a substrate loading cassette and a manufacturing method thereof are provided to improve the performance of the support bar by using carbon fiber reinforced resin and glass fiber reinforced resin. CONSTITUTION: A glass fiber reinforced resin layer(110) is formed in the shape of a hollow pillar. A carbon fiber reinforced resin layer(120) is stacked on the outer circumference of the glass fiber reinforced layer. The thickness of the left and right side of the glass fiber reinforced resin layer is thick. The thickness of the top and bottom side the carbon fiber reinforced resin layer is thick. A fabric layer is stacked on the inner circumference of the glass fiber reinforced resin layer. |
申请公布号 |
KR101300688(B1) |
申请公布日期 |
2013.08.26 |
申请号 |
KR20110042260 |
申请日期 |
2011.05.04 |
申请人 |
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发明人 |
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分类号 |
B32B37/00;B65D85/48;G02F1/13;H01L21/673 |
主分类号 |
B32B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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