| 摘要 |
PURPOSE: A high current-intermediate energy ion inspirator is provided to reduce usage costs by improving an energy band. CONSTITUTION: A terminal unit (2) comprises a source head unit, a mass analyzer, an accelerating tube unit, and scanning assembly. The source head unit generates an ion beam. The scanning assembly deflects the ion beam. A first insulation unit (11) insulates the source head unit and the terminal unit. A second insulation unit (60) is formed between an external lower end of the terminal unit and a lower end of an ion inspirator. |
