| 摘要 |
PURPOSE: An apparatus for drying substrate is provided to control particle generation by supporting a driving shaft and a roller of a substrate transport apparatus with bearing. CONSTITUTION: A drive motor rotates a driving shaft(210). A lower roller(220) supports and pressurizes a lower part of a substrate . An upper roller(230) supports and pressurizes an upper part of the substrate. A guide unit includes a bearing which supports the driving shaft, the lower roller, and the upper roller. The guide unit includes the driving shaft guide and a roller guide. |
