| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device and a maintenance method therefor, capable of limiting a space necessary for lid opening/closing option. SOLUTION: In the processing device for performing prescribed processing to a processing target body in a processing chamber 60, the processing chamber 60 includes: a chamber main body 61; a lid 62 disposed on the chamber main body 61 in an openable/closable manner; and an open/close device 63 for opening and closing the lid 62. The open/close device 63 includes: a lifting mechanism 150 capable of lifting the lid 62 to a rotatable non-contact rotation position in the vertical direction, without making the lid 62 contact to the chamber main body 61; a rotary mechanism 160 for rotating the lid 62 in the vertical direction; and a slide mechanism 140 for sliding the lid 62 to a position in which the lid 62 does not overlap with the chamber main body 61 in the vertical state. COPYRIGHT: (C)2012,JPO&INPIT |
