| 摘要 |
<p>The invention relates to an acoustic volume wave resonator configured to resonate at a predetermined work frequency comprising: a mounting (12), comprising a first surface (14) and a second surface (16), a resonating substrate (18), comprising a first surface (20) and a second surface (22), and a diaphragm (24) rigidly connecting the second surface (16) of the mounting on the one hand and the first surface (20) of the resonating substrate on the other hand, The mounting comprises an internal cavity (28) and an internal electrode (32), so as to form a gap area (34) between the internal electrode (24) and a portion (35) of the diaphragm. The resonating substrate is configured to generate, between its first surface and its second surface, longitudinal mode acoustic waves vibrating at the work frequency of the resonator, when an electrostatic field having a sinusoidal component at the work frequency is generated in the gap area by applying a differential voltage between the diaphragm or the first surface of the resonating substrate on the one hand and the internal electrode on the other hand.</p> |
